PHOSPHORUS DIFFUSION IN POLYCRYSTALLINE SILICON

被引：21

|

作者：

LOSEE, DL

LAVINE, JP

TRABKA, EA

LEE, ST

JARMAN, CM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.333166

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1218 / 1220

页数：3

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