A UNIT FOR INSPECTING THE PRODUCTION PROCESS OF THIN-LAYER SEMICONDUCTOR AND METALLIC STRUCTURES

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作者：

GAVRILIN, VV

GRIGULIS, YK

PORINSH, VM

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SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR | 1980年 / 16卷 / 08期

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T [工业技术];

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08 ;

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页码：559 / 563

页数：5

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