A UNIT FOR INSPECTING THE PRODUCTION PROCESS OF THIN-LAYER SEMICONDUCTOR AND METALLIC STRUCTURES

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作者：
GAVRILIN, VV
GRIGULIS, YK
PORINSH, VM
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来源：
SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR | 1980年 / 16卷 / 08期
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T [工业技术];
学科分类号：
08 ;
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页码：559 / 563
页数：5
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