共 50 条
- [21] APPLICATION OF A LOW-PRESSURE RADIO-FREQUENCY DISCHARGE SOURCE TO POLYSILICON GATE ETCHING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (01): : 1 - 4
- [22] Plasma Interaction with Boundary Surfaces in Low-Pressure Radio-Frequency Capacitive Discharge Physics of Atomic Nuclei, 2019, 82 : 1433 - 1436
- [23] High-energy ballistic electrons in low-pressure radio-frequency plasmas PLASMA SOURCES SCIENCE & TECHNOLOGY, 2020, 29 (09):
- [25] EMISSION-SPECTROSCOPY AND ACTINOMETRY IN A MAGNETIZED LOW-PRESSURE RADIO-FREQUENCY DISCHARGE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (05): : 3736 - 3745
- [26] The influence of external parameters on the peculiarities of a hybrid low-pressure radio-frequency discharge Moscow University Physics Bulletin, 2012, 67 : 92 - 96
- [27] High-voltage nanosecond pulses in a low-pressure radio-frequency discharge PHYSICAL REVIEW E, 2013, 87 (06):