The influence of external parameters on the peculiarities of a hybrid low-pressure radio-frequency discharge

This paper deals with the experimental study of the patterns of the RF power input into the plasma of a hybrid RF discharge that was sustained by an RF power unit, which consisted of a spiral antenna connected in parallel with capacitor electrodes. At low values of RF generator power, RF power has been shown to be derived in the hybrid discharge through the capacitive channel; the role of the inductive channel becomes more significant at higher RF generator power as the power of the RF generator increases. It was demonstrated that at a low power of the RF generator the RF power occurs in the hybrid discharge essentially through the capacitive channel and then increases as the power of the RF generator increases. The larger the contribution of the inductive channel is, the smaller the value of the dividing capacity included in the capacitive discharge chain is.