共 50 条
- [32] The electrical asymmetry effect in capacitively coupled radio-frequency discharges PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (02):
- [34] Global model for high pressure electronegative radio-frequency discharges JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (01): : 113 - 126
- [35] Global model for high pressure electronegative radio-frequency discharges J Vac Sci Technol A, 1 (113):