FORMATION OF THIN SI3N4 FILMS BY NITROGEN ION-IMPLANTATION INTO SILICON

被引：49
|
作者：
YADAV, AD
JOSHI, MC
机构：
来源：
THIN SOLID FILMS | 1979年 / 59卷 / 03期
关键词：
D O I：
10.1016/0040-6090(79)90440-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：313 / 317
页数：5
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