INSTRUMENTATION FOR ELECTRON-BEAM LITHOGRAPHY

被引:10
|
作者
CHANG, THP [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1109/TMAG.1974.1058450
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:883 / 887
页数:5
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