STRUCTURE AND PROPERTIES OF RF SPUTTERED, SUPERCONDUCTING TANTALUM FILMS

被引：18
|
作者：
SCHREY, F
MATHIS, RD
PAYNE, RT
MURR, LE
机构：
来源：
THIN SOLID FILMS | 1970年 / 5卷 / 01期
关键词：
D O I：
10.1016/0040-6090(70)90048-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：29 / &
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