IMPERFECTIONS IN AND ION DIFFUSION THROUGH OXIDE LAYERS ON SILICON

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作者：

MORRISON, SR

MADOU, MJ

FRESE, KW

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APPLIED SURFACE SCIENCE | 1980年 / 6卷 / 02期

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O64 [物理化学（理论化学）、化学物理学];

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070304 ; 081704 ;

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页码：138 / 148

页数：11

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