IMPERFECTIONS IN AND ION DIFFUSION THROUGH OXIDE LAYERS ON SILICON

被引：0
|
作者：
MORRISON, SR
MADOU, MJ
FRESE, KW
机构：
来源：
APPLIED SURFACE SCIENCE | 1980年 / 6卷 / 02期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：138 / 148
页数：11
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