ESR STUDY OF SIN FILMS PREPARED BY ECR PLASMA CVD METHOD

被引：0
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作者：
IZUMI, T
SHIBUYA, M
HIRAO, T
KAMADA, T
MATSUMORI, T
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来源：
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS | 1988年 / 8卷
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T [工业技术];
学科分类号：
08 ;
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页码：420 / 422
页数：3
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