PRECIPITATION OF OXYGEN IN DISLOCATION-FREE SILICON

被引:117
|
作者
TEMPELHOFF, K [1 ]
SPIEGELBERG, F [1 ]
GLEICHMANN, R [1 ]
WRUCK, D [1 ]
机构
[1] ACAD SCI GDR,INST FESTKORPERPHYS & ELEKTRONENMIKROSKOPIE,DDR-401 HALLE,GER DEM REP
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关键词
D O I
10.1002/pssa.2210560123
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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页码:213 / 223
页数:11
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