Dislocation-free silicon on sapphire by wafer bonding

被引：0
|
作者：
Abe, Takao [1 ]
Ohki, Konomu [1 ]
Uchiyama, Atsuo [1 ]
Nakazawa, Kazushi [1 ]
Nakazato, Yasuyuki [1 ]
机构：
[1] Shin-Etsu Handotai, Gunma, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 1 B期
关键词：
Semiconducting silicon;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：514 / 518
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