CHARACTERISTICS OF LAYERED SYNTHETIC MICROSTRUCTURE DEVICES FOR X-RAY SPECTROMETRY APPLICATIONS

Multi-layer structures offer the unique ability to control the spectral distribution of x-rays at non-grazing incidence and to provide the ability to focus x-rays. This combination of attributes offers some exciting possibilities for x-ray spectrometry. Double crystal monochromators using multi-layer structures have shown high energy selectivity with reasonable throughput. X-ray optical systems using multi-layers deposited on figured substrates have been used to focus x-rays from a conventional tube to micron-sized spots. Future x-ray spectrometers will likely take advantage of the energy selection and focusing capabilities of multi-layers as they become more readily available. Topics covered in this paper include the modification of spectral emissions from a conventional copper anode x-ray tube by a multi-layer, and multi-layer fabrication and characterization techniques as they apply to energy-dispersive x-ray spectrometry.