ABSOLUTE DOSIMETRY OF ION-IMPLANTED IMPURITIES USING A CALORIMETRIC METHOD

被引：4
|
作者：
HEMMENT, PLF [1 ]
机构：
[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND
来源：
VACUUM | 1977年 / 27卷 / 10-1期
关键词：
D O I：
10.1016/S0042-207X(77)80443-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
下载
收藏
页码：611 / 616
页数：6
相关论文
共 50 条
  • [31] THE EFFECT OF SPUTTERED IMPURITIES ON THE DEEP ION-IMPLANTED P+N JUNCTION IN SILICON
    ZAMASTIL, J
    MAY, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 370 - 371
  • [32] Advanced micromachine fabrication using ion-implanted layers
    Nakano, S.
    Ogiso, H.
    Yabe, A.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1999, 155 (01): : 79 - 84
  • [33] ENCAPSULATION OF ION-IMPLANTED GAAS USING NATIVE OXIDES
    SEALY, BJ
    DCRUZ, ADE
    ELECTRONICS LETTERS, 1975, 11 (15) : 323 - 324
  • [34] Removal of Ion-Implanted Photoresists Using Wet Ozone
    Yamamoto, Masashi
    Goto, Yousuke
    Maruoka, Takeshi
    Horibe, Hideo
    Miura, Toshinori
    Kusano, Eiji
    Tagawa, Seiichi
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (07) : H505 - H511
  • [35] Ion-implanted resist removal using atomic hydrogen
    Horibe, H.
    Yamamoto, M.
    Maruoka, T.
    Goto, Y.
    Kono, A.
    Nishiyama, I.
    Tagawa, S.
    THIN SOLID FILMS, 2011, 519 (14) : 4578 - 4581
  • [36] LATTICE-SITE LOCATION OF ION-IMPLANTED IMPURITIES IN COPPER AND OTHER FCC METALS
    BORDERS, JA
    POATE, JM
    PHYSICAL REVIEW B, 1976, 13 (03): : 969 - 979
  • [37] PHOTOLUMINESCENCE OF ION-IMPLANTED ZNTE
    WOOI, WR
    MEESE, JM
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (03): : 319 - 319
  • [38] PROPERTIES OF ION-IMPLANTED GLASSES
    MAZZOLDI, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 1089 - 1098
  • [39] PHOTOLUMINESCENCE OF ION-IMPLANTED PHOSPHORS
    VIRDI, GS
    SINGH, N
    NATH, N
    PRAMANA, 1988, 31 (04) : 309 - 312
  • [40] ION-IMPLANTED GRAPHITIC CARBONS
    KENNY, MJ
    POLLOCK, JTA
    WIELUNSKI, LS
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 704 - 707
12345