共 50 条
- [21] METAL-ION SOURCE USING RF DISCHARGE COMBINED WITH SPUTTERING REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (11): : 1760 - 1762
- [23] Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge High Energy Chemistry, 2023, 57 : S227 - S233
- [26] INVESTIGATION INTO MECHANISMS OCCURRING IN DISCHARGE OF AN ION-SOURCE BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (11): : 1018 - 1018
- [28] Investigation of Helicon discharge plasma parameters in the hybrid RF plasma system Applied Physics, 2015, 2015-January (03): : 25 - 28
- [30] Characterization of Microwave Discharge Ion Source for high proton beam production EUROPEAN PHYSICAL JOURNAL PLUS, 2012, 127 (11):