CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE .4. HARDNESS CHARACTERISTICS

被引：33
|
作者：
NIIHARA, K [1 ]
HIRAI, T [1 ]
机构：
[1] TOHOKU UNIV,IRON STEEL & MET RES INST,SENDAI,MIYAGI 980,JAPAN
来源：
JOURNAL OF MATERIALS SCIENCE | 1977年 / 12卷 / 06期
关键词：
D O I：
10.1007/BF02426863
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1243 / 1252
页数：10
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