CRYSTALLIZATION AND SINTERING CHARACTERISTICS OF CHEMICALLY VAPOR-DEPOSITED SILICON-NITRIDE POWDERS

被引：11
|
作者：
GOMEZALEIXANDRE, C
ALBELLA, JM
MARTINEZDUART, JM
ORGAZ, F
机构：
[1] CSIC,INST CIENCIA MAT,E-28049 MADRID,SPAIN
[2] ERCROS SA,CTR INVEST,E-28760 MADRID,SPAIN
来源：
JOURNAL OF MATERIALS RESEARCH | 1992年 / 7卷 / 10期
关键词：
D O I：
10.1557/JMR.1992.2864
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
High purity silicon nitride powders have been obtained by Chemical Vapor Deposition (CVD), through the reaction of SiH4 and NH3 gas mixtures at 1000-degrees-C in a quartz reactor. The crystallization characteristics of the powder have been followed by infrared and x-ray diffraction analysis. The material shows a transition from amorphous to the alpha-phase after a thermal treatment at about 1300-degrees-C for 1 h, while the beta-phase starts to appear at 1725-degrees-C. The sintering properties of the amorphous and crystalline phases were evaluated by measuring the dilatometric curves of compacted powders.
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页码：2864 / 2868
页数：5
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