STRUCTURAL-PROPERTIES OF SILICON THIN-FILMS DEPOSITED BY GLOW-DISCHARGE

被引：6
|
作者：
MESSANA, C
DEANGELIS, BA
CONTE, G
GRAMACCIONI, C
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 06期
关键词：
D O I：
10.1088/0022-3727/14/6/002
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L91 / L94
页数：4
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