STRUCTURAL-PROPERTIES OF SILICON THIN-FILMS DEPOSITED BY GLOW-DISCHARGE

被引：6

|

作者：

MESSANA, C

DEANGELIS, BA

CONTE, G

GRAMACCIONI, C

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 06期

关键词：

D O I：

10.1088/0022-3727/14/6/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L91 / L94

页数：4

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