ION-BEAM-INDUCED FORMATION OF THE PDSI SILICIDE

被引：47
|
作者：
TSAUR, BY
LAU, SS
MAYER, JW
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 03期
关键词：
D O I：
10.1063/1.91103
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：225 / 227
页数：3
相关论文
共 50 条
  • [41] INSITU MEASUREMENT OF ION-BEAM-INDUCED DEPOSITION OF GOLD
    DUBNER, AD
    WAGNER, A
    JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) : 3636 - 3643
  • [42] DISLOCATION IMAGING USING ION-BEAM-INDUCED CHARGE
    BREESE, MBH
    KING, PJC
    GRIME, GW
    APPLIED PHYSICS LETTERS, 1993, 62 (25) : 3309 - 3311
  • [43] MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE
    BREESE, MBH
    KING, PJC
    GRIME, GW
    WATT, F
    JOURNAL OF APPLIED PHYSICS, 1992, 72 (06) : 2097 - 2104
  • [44] ION-BEAM-INDUCED CONVERSION OF PVC INTO A CONDUCTING POLYENE
    DAVENAS, J
    TRAN, VH
    BOITEUX, G
    SYNTHETIC METALS, 1995, 69 (1-3) : 583 - 584
  • [45] THERMAL AND ION INDUCED SILICIDE FORMATION
    HUNG, LS
    HONG, QZ
    MAYER, JW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 414 - 419
  • [46] Subwavelength imaging through ion-beam-induced upconversion
    Zhaohong Mi
    Yuhai Zhang
    Sudheer Kumar Vanga
    Ce-Belle Chen
    Hong Qi Tan
    Frank Watt
    Xiaogang Liu
    Andrew A. Bettiol
    Nature Communications, 6
  • [47] ION-BEAM-INDUCED CONDUCTIVITY IN POLYMER-FILMS
    VENKATESAN, T
    FORREST, SR
    KAPLAN, ML
    MURRAY, CA
    SCHMIDT, PH
    WILKENS, BJ
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3150 - 3153
  • [48] ION-BEAM-INDUCED COMPACTION IN GLASSY-CARBON
    MCCULLOCH, D
    HOFFMAN, A
    PRAWER, S
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) : 135 - 138
  • [49] Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon
    Williams, J. S.
    Azevedo, G. de M.
    Bernas, H.
    Fortuna, F.
    MATERIALS SCIENCE WITH ION BEAMS, 2010, 116 : 73 - 111
  • [50] ION-BEAM-INDUCED AND LASER-INDUCED SURFACE MODIFICATIONS
    APPLETON, BR
    SARTWELL, B
    PEERCY, PS
    SCHAEFER, R
    OSGOOD, R
    MATERIALS SCIENCE AND ENGINEERING, 1985, 70 (1-2): : 23 - 51
12345