ION-BEAM-INDUCED FORMATION OF THE PDSI SILICIDE

被引：47
|
作者：
TSAUR, BY
LAU, SS
MAYER, JW
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 03期
关键词：
D O I：
10.1063/1.91103
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：225 / 227
页数：3
相关论文
共 50 条
  • [31] Ion-beam-induced amorphization and recrystallization in silicon
    Pelaz, L
    Marqués, LA
    Barbolla, J
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (11) : 5947 - 5976
  • [32] Ion-beam-induced collective rotation of nanocrystals
    Zizak, Ivo
    Darowski, Nora
    Klaumuenzer, Siegfried
    Schumacher, Gerhard
    Gerlach, Juergen W.
    Assmann, Walter
    PHYSICAL REVIEW LETTERS, 2008, 101 (06)
  • [33] ION-BEAM-INDUCED DESORPTION OF ARN+ ION CLUSTERS
    CHRISTIANSEN, JW
    TSONG, IST
    LIN, SH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 699 - 702
  • [34] ION-BEAM MIXING FOR SILICIDE FORMATION
    AGAMY, SA
    KHALIL, MY
    BADAWI, AA
    ISOTOPENPRAXIS, 1990, 26 (06): : 265 - 268
  • [35] Nanoscale pattern formation in Pt thin films due to ion-beam-induced dewetting
    Hu, XY
    Cahill, DG
    Averback, RS
    APPLIED PHYSICS LETTERS, 2000, 76 (22) : 3215 - 3217
  • [36] THE FORMATION OF CONDUCTIVE FILMS ON POLYIMIDE BY ION-BEAM-INDUCED DECOMPOSITION OF METAL-COMPOUNDS
    ESKILDSEN, SS
    SORENSEN, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 481 - 486
  • [37] Ion-beam-induced amorphous structures in silicon carbide
    Bae, IT
    Ishimaru, M
    Hirotsu, Y
    Matsumura, S
    Sickafus, KE
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 : 974 - 978
  • [38] INFLUENCE OF OXIDE THICKNESS ON ION-BEAM-INDUCED AND THERMAL COSI2 FORMATION
    DEHM, C
    KASKO, I
    BURTE, EP
    GYULAI, J
    RYSSEL, H
    APPLIED SURFACE SCIENCE, 1993, 73 : 268 - 276
  • [39] TWIN FORMATION AND AU SEGREGATION DURING ION-BEAM-INDUCED EPITAXY OF AMORPHOUS SI
    PRIOLO, F
    BATSTONE, JL
    POATE, JM
    LINNROS, J
    JACOBSON, DC
    THOMPSON, MO
    APPLIED PHYSICS LETTERS, 1988, 52 (13) : 1043 - 1045
  • [40] Electrical transients in the ion-beam-induced nitridation of silicon
    Petravic, M
    Deenapanray, PNK
    APPLIED PHYSICS LETTERS, 2001, 78 (22) : 3445 - 3447
12345