ION-BEAM-INDUCED FORMATION OF THE PDSI SILICIDE

被引：47
|
作者：
TSAUR, BY
LAU, SS
MAYER, JW
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 03期
关键词：
D O I：
10.1063/1.91103
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：225 / 227
页数：3
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