A REGRESSION METHOD FOR DETERMINING EPITAXIAL FILM THICKNESS

被引：0

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作者：

GRIGOREV, VK

PETROVSKII, VI

FEDUNINA, TA

机构：

来源：

MEASUREMENT TECHNIQUES USSR | 1981年 / 24卷 / 12期

关键词：

D O I：

10.1007/BF00828708

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：1042 / 1045

页数：4

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