A REGRESSION METHOD FOR DETERMINING EPITAXIAL FILM THICKNESS

被引：0
|
作者：
GRIGOREV, VK
PETROVSKII, VI
FEDUNINA, TA
机构：
来源：
MEASUREMENT TECHNIQUES USSR | 1981年 / 24卷 / 12期
关键词：
D O I：
10.1007/BF00828708
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：1042 / 1045
页数：4
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