THE GROWTH OF SILICON FROM SILANE IN COLD WALL CVD SYSTEMS

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作者：
CLAASSEN, WAP
BLOEM, J
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PHILIPS JOURNAL OF RESEARCH | 1981年 / 36卷 / 02期
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T [工业技术];
学科分类号：
08 ;
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页码：122 / 137
页数：16
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