DEPENDENCE OF PLASMA-ASSISTED BPSG DEPOSITION ON SUBSTRATE PROPERTIES

被引：4
|
作者：
PARTLOW, WD [1 ]
SAMUELS, BC [1 ]
机构：
[1] WESTINGHOUSE ELECT CORP,DESC APPL TECHNOL DIV,BALTIMORE,MD 21203
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 07期
关键词：
D O I：
10.1149/1.2100748
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1740 / 1743
页数：4
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