PLASMA-ASSISTED DEPOSITION PROCESSES - THEORY, MECHANISMS AND APPLICATIONS

被引：56

|

作者：

THORNTON, JA

机构：

来源：

THIN SOLID FILMS | 1983年 / 107卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90003-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：3 / 19

页数：17

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