PLASMA-ASSISTED DEPOSITION PROCESSES - THEORY, MECHANISMS AND APPLICATIONS

被引：56
|
作者：
THORNTON, JA
机构：
来源：
THIN SOLID FILMS | 1983年 / 107卷 / 01期
关键词：
D O I：
10.1016/0040-6090(83)90003-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：3 / 19
页数：17
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