DEPENDENCE OF PLASMA-ASSISTED BPSG DEPOSITION ON SUBSTRATE PROPERTIES

被引：4

作者：

PARTLOW, WD ^{[1
]}

SAMUELS, BC ^{[1
]}

机构：

[1] WESTINGHOUSE ELECT CORP,DESC APPL TECHNOL DIV,BALTIMORE,MD 21203

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 07期

关键词：

D O I：

10.1149/1.2100748

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1740 / 1743

页数：4

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