PULSED-LASER ABLATION SYNTHESIS AND CHARACTERIZATION OF LAYERED PT/SRBI2TA2O9/PT FERROELECTRIC CAPACITORS WITH PRACTICALLY NO POLARIZATION FATIGUE

被引：236
|
作者：
DAT, R
LEE, JK
AUCIELLO, O
KINGON, AI
机构：
[1] MICROELECTR CTR N CAROLINA,DIV ELECTR TECHNOL,RES TRIANGLE PK,NC 27709
[2] KOREA ADV INST SCI & TECHNOL,DIV CERAM,SEOUL,SOUTH KOREA
来源：
APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 04期
关键词：
D O I：
10.1063/1.115173
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Pulsed laser ablation deposition was used to synthesize polycrystalline SrBi2Ta2O9 layered ferroelectric thin films on platinized silicon substrates. Top electrodes were produced by de magnetron sputter deposition to fabricate capacitors for electrical tests. The polarization electric field hysteresis loops showed saturation in the 2-4 V range with a coercive field of 25 kV/cm. The capacitors showed practically no polarization fatigue up to 10(11) switching cycles. The resistivity of the SrBi2Ta2O9 for a coercive field of 100 kV/cm was approximately 2X10(11) Omega cm. Retention and imprint characteristics of these capacitors showed no degradation as a function of cumulative waiting times. (C) 1995 American Institute of Physics.
引用
收藏
页码：572 / 574
页数：3
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