ION-IMPLANTATION FOR SEMICONDUCTOR-DEVICES

被引：0

|

作者：

DUCHYNSKI, RJ ^{[1
]}

机构：

[1] WESTERN ELECT CO INC,DEPT COMPOUND MAT PREPARAT ENGN,READING,PA 19603

来源：

WESTERN ELECTRIC ENGINEER | 1977年 / 21卷 / 02期

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D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：59 / 66

页数：8

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