ION-IMPLANTATION IN COMPOUND SEMICONDUCTOR RESEARCH

被引：0

|

作者：

STREETMAN, RG ^{[1
]}

机构：

[1] UNIV ILLINOIS,URBANA,IL 61801

来源：

BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1980年 / 25卷 / 07期

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中图分类号：

O4 [物理学];

学科分类号：

0702 ;

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页码：774 / 774

页数：1

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