SPUTTER-INDUCED DAMAGE IN AL/N-GAAS AND AL/P-GAAS SCHOTTKY BARRIERS

被引：40
|
作者：
VANDENBROUCKE, DA
VANMEIRHAEGHE, RL
LAFLERE, WH
CARDON, F
机构：
来源：
SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1987年 / 2卷 / 05期
关键词：
D O I：
10.1088/0268-1242/2/5/008
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：293 / 298
页数：6
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