PROPERTIES OF LASER PLASMA DEPOSITED CARBON-FILMS

被引：2
|
作者：
RICHTER, A [1 ]
MUHLING, I [1 ]
KLOSE, M [1 ]
机构：
[1] TECH UNIV KARL MARX STADT,SEKT PHYS,DDR-9010 KARL MARX STADT,GER DEM REP
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1988年 / 107卷 / 01期
关键词：
D O I：
10.1016/0022-3093(88)90101-9
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
9
引用
收藏
页码：128 / 131
页数：4
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