STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS

被引:44
|
作者
BEWILOGUA, K
DIETRICH, D
PAGEL, L
SCHURER, C
WEISSMANTEL, C
机构
关键词
D O I
10.1016/0039-6028(79)90408-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
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页码:308 / 313
页数:6
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