PREPARATION AND PROPERTIES OF CARBON-FILMS WITH MAGNETRON SPUTTERING

被引：7
|
作者：
HOSOKAWA, N [1 ]
KONISHI, A [1 ]
HIRATSUKA, H [1 ]
ANNOH, K [1 ]
机构：
[1] JAPAN ATOM ENERGY RES INST,MIMATO KU,TOKYO,JAPAN
来源：
THIN SOLID FILMS | 1980年 / 73卷 / 01期
关键词：
D O I：
10.1016/0040-6090(80)90337-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：115 / 116
页数：2
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