DESIGN OF A VARIABLE-APERTURE PROJECTION AND SCANNING SYSTEM FOR ELECTRON-BEAM

被引：43
|
作者：
GOTO, E
SOMA, T
IDESAWA, M
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期
关键词：
Compendex;
D O I：
10.1116/1.569620
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
ELECTRON OPTICS
引用
收藏
页码：883 / 886
页数：4
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