PLASMA-ETCHING FOR III-V COMPOUND DEVICES .2.

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作者：
IBBOTSON, DE
FLAMM, DL
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SOLID STATE TECHNOLOGY | 1988年 / 31卷 / 11期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：105 / &
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