RF SPUTTERING OF GALLIUM-PHOSPHIDE THIN-FILMS

被引：12
|
作者：
STAROSTA, K
ZELINKA, J
BERKOVA, D
KOHOUT, J
机构：
来源：
THIN SOLID FILMS | 1979年 / 61卷 / 02期
关键词：
D O I：
10.1016/0040-6090(79)90467-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
下载
收藏
页码：241 / 248
页数：8
相关论文
共 50 条
  • [1] PREPARATION OF GALLIUM-PHOSPHIDE THIN-FILMS FROM ORGANOMETALLIC GALLIUM
    GARELIK, S
    PRATT, B
    WEIL, RB
    JANAI, M
    VACUUM, 1983, 33 (04) : 249 - 249
  • [2] GALLIUM-PHOSPHIDE FILMS DEPOSITED BY SPUTTERING
    SOSNIAK, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (01): : 110 - &
  • [3] ZINC PHOSPHIDE THIN-FILMS GROWN BY RF SPUTTERING
    SUDA, T
    MIYAKAWA, T
    KURITA, S
    JOURNAL OF CRYSTAL GROWTH, 1988, 86 (1-4) : 423 - 429
  • [4] Infrared transmission performance of gallium phosphide thin films deposited by RF magnetron sputtering
    Li, YP
    Liu, ZT
    PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5, 2005, 475-479 : 3685 - 3688
  • [5] EFFECTS OF HYDROGEN INCORPORATION DURING DEPOSITION BY SPUTTERING FOR AMORPHOUS GALLIUM-PHOSPHIDE FILMS
    MATSUMOTO, N
    KUMABE, K
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (05) : 1011 - 1012
  • [6] The properties of gallium phosphide films prepared by RF magnetron sputtering
    Song, JQ
    Liu, ZT
    Guo, DG
    Yu, ZQ
    Gng, DS
    Zheng, XL
    FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2000, 4086 : 104 - 107
  • [7] CONDUCTION PROCESSES IN GALLIUM-PHOSPHIDE FILMS
    BARBE, DF
    SAKS, NS
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (04): : 595 - &
  • [8] ON THE GROWTH OF GALLIUM-PHOSPHIDE LAYERS ON GALLIUM-PHOSPHIDE SUBSTRATES BY MOVPE
    LEYS, MR
    PISTOL, ME
    TITZE, H
    SAMUELSON, L
    JOURNAL OF ELECTRONIC MATERIALS, 1989, 18 (01) : 25 - 31
  • [9] PLZT AND PZT THIN-FILMS BY RF SPUTTERING
    ISHIDA, M
    TSUJI, S
    MATSUNAMI, H
    TANAKA, T
    FERROELECTRICS, 1978, 19 (3-4) : 166 - 166
  • [10] PREPARATION OF PLZT THIN-FILMS BY RF SPUTTERING
    MATSUNAMI, H
    SUZUKI, M
    ISHIDA, M
    TANAKA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (06) : 1163 - 1164
12345