RF SPUTTERING OF GALLIUM-PHOSPHIDE THIN-FILMS

被引：12
|
作者：
STAROSTA, K
ZELINKA, J
BERKOVA, D
KOHOUT, J
机构：
来源：
THIN SOLID FILMS | 1979年 / 61卷 / 02期
关键词：
D O I：
10.1016/0040-6090(79)90467-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：241 / 248
页数：8
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