PLZT AND PZT THIN-FILMS BY RF SPUTTERING

被引：0
|
作者：
ISHIDA, M [1 ]
TSUJI, S [1 ]
MATSUNAMI, H [1 ]
TANAKA, T [1 ]
机构：
[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO 606,JAPAN
来源：
FERROELECTRICS | 1978年 / 19卷 / 3-4期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：166 / 166
页数：1
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