PREPARATION OF PLZT THIN-FILMS BY RF SPUTTERING

被引：17
|
作者：
MATSUNAMI, H [1 ]
SUZUKI, M [1 ]
ISHIDA, M [1 ]
TANAKA, T [1 ]
机构：
[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,SAKYO KU,KYOTO 606,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1976年 / 15卷 / 06期
关键词：
D O I：
10.1143/JJAP.15.1163
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1163 / 1164
页数：2
相关论文
共 50 条
  • [1] PREPARATION AND PROPERTIES OF FERROELECTRIC PLZT THIN-FILMS BY RF SPUTTERING
    ISHIDA, M
    MATSUNAMI, H
    TANAKA, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) : 951 - 953
  • [2] PLZT AND PZT THIN-FILMS BY RF SPUTTERING
    ISHIDA, M
    TSUJI, S
    MATSUNAMI, H
    TANAKA, T
    [J]. FERROELECTRICS, 1978, 19 (3-4) : 166 - 166
  • [3] FERROELECTRIC PLZT THIN-FILMS FABRICATED BY RF SPUTTERING
    TANAKA, K
    HIGUMA, Y
    YOKOYAMA, K
    NAKAGAWA, T
    HAMAKAWA, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (07) : 1381 - 1382
  • [4] SPUTTERING PREPARATION OF FERROELECTRIC PLZT THIN-FILMS AND THEIR OPTICAL APPLICATIONS
    ADACHI, H
    WASA, K
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1991, 38 (06) : 645 - 655
  • [5] STUDY ON FERROELECTRIC PLZT THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    LU, DX
    LI, ZY
    HUANG, LB
    LIN, GQ
    [J]. CHINESE SCIENCE BULLETIN, 1994, 39 (18): : 1507 - 1510
  • [6] PREPARATION OF FERROELECTRIC THIN-FILMS BY RF MAGNETRON SPUTTERING
    OGAWA, T
    SENDA, A
    KASANAMI, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 : 11 - 14
  • [7] PREPARATION OF MGO THIN-FILMS BY RF MAGNETRON SPUTTERING
    KANEKO, Y
    MIKOSHIBA, N
    YAMASHITA, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (05): : 1091 - 1092
  • [8] PREPARATION OF FERROELECTRIC PLZT THIN-FILMS
    MATSUNAMI, H
    ISHIDA, M
    TANAKA, T
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1977, 6 (06) : 753 - 753
  • [9] PREPARATION OF FERROELECTRIC PLZT THIN-FILMS
    MATSUNAMI, H
    ISHIDA, M
    TANAKA, T
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1978, 7 (02) : 229 - 235
  • [10] PREPARATION OF FERROMAGNETIC MNCUBI THIN-FILMS BY AN RF-SPUTTERING
    TERUI, H
    KATSUI, A
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (11) : 2151 - 2154
12345