SCANNING PROBE TIPS FORMED BY FOCUSED ION-BEAMS

被引：67

作者：

VASILE, MJ ^{[1
]}

GRIGG, DA ^{[1
]}

GRIFFITH, JE ^{[1
]}

FITZGERALD, EA ^{[1
]}

RUSSELL, PE ^{[1
]}

机构：

[1] N CAROLINA STATE UNIV,RALEIGH,NC 27695

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 09期

关键词：

D O I：

10.1063/1.1142334

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt-Ir shanks, but this technique is not limited to these materials. The tips were found to have cone angles of 12 +/- 3-degrees and radii of curvature as sharp as 4 nm. Focused ion beam machining allows precise control of the final shape of the tips which is important in metrology measurements of various nanostructure devices.

引用

页码：2167 / 2171

页数：5

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