SCANNING PROBE TIPS FORMED BY FOCUSED ION-BEAMS

被引：67
|
作者：
VASILE, MJ [1 ]
GRIGG, DA [1 ]
GRIFFITH, JE [1 ]
FITZGERALD, EA [1 ]
RUSSELL, PE [1 ]
机构：
[1] N CAROLINA STATE UNIV,RALEIGH,NC 27695
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 09期
关键词：
D O I：
10.1063/1.1142334
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt-Ir shanks, but this technique is not limited to these materials. The tips were found to have cone angles of 12 +/- 3-degrees and radii of curvature as sharp as 4 nm. Focused ion beam machining allows precise control of the final shape of the tips which is important in metrology measurements of various nanostructure devices.
引用
收藏
页码：2167 / 2171
页数：5
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