ELECTRICAL CHARACTERISTICS OF COPPER POLYIMIDE THIN-FILM MULTILAYER INTERCONNECTS

被引:4
|
作者
LANE, TA
BELCOURT, FJ
JENSEN, RJ
机构
关键词
D O I
10.1109/TCHMT.1987.1134780
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:577 / 585
页数:9
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