A MULTILAYER THIN-FILM CAPACITIVE PRESSURE TRANSDUCER

被引：0
|
作者：
KAZARYAN, AA
机构：
来源：
MEASUREMENT TECHNIQUES USSR | 1992年 / 35卷 / 01期
关键词：
D O I：
10.1007/BF00977885
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
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收藏
页码：79 / 82
页数：4
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