SOFT-X-RAY FOUCAULT TEST - A PATH TO DIFFRACTION-LIMITED IMAGING

被引：13

作者：

RAYCHAUDHURI, AK ^{[1
]}

NG, W ^{[1
]}

LIANG, S ^{[1
]}

CERRINA, F ^{[1
]}

机构：

[1] UNIV WISCONSIN,CTR XRAY LITHOG,STOUGHTON,WI 53589

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1994年 / 347卷 / 1-3期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-9002(94)91911-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present the development of a soft X-ray Foucault test capable of characterizing the imaging properties of a soft X-ray optical system at its operational wavelength and its operational configuration. This optical test enables direct visual inspection of imaging aberrations and provides real-time feedback for the alignment of high resolution soft X-ray optical systems. A first application of this optical test was carried out on a Mo-Si multilayer-coated Schwarzschild objective as part of the MAXIMUM project. Results from the alignment procedure are presented as well as the possibility for testing in the hard X-ray regime.

引用

页码：364 / 371

页数：8

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