SOFT-X-RAY FOUCAULT TEST - A PATH TO DIFFRACTION-LIMITED IMAGING

被引：13
|
作者：
RAYCHAUDHURI, AK [1 ]
NG, W [1 ]
LIANG, S [1 ]
CERRINA, F [1 ]
机构：
[1] UNIV WISCONSIN,CTR XRAY LITHOG,STOUGHTON,WI 53589
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1994年 / 347卷 / 1-3期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1016/0168-9002(94)91911-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We present the development of a soft X-ray Foucault test capable of characterizing the imaging properties of a soft X-ray optical system at its operational wavelength and its operational configuration. This optical test enables direct visual inspection of imaging aberrations and provides real-time feedback for the alignment of high resolution soft X-ray optical systems. A first application of this optical test was carried out on a Mo-Si multilayer-coated Schwarzschild objective as part of the MAXIMUM project. Results from the alignment procedure are presented as well as the possibility for testing in the hard X-ray regime.
引用
收藏
页码：364 / 371
页数：8
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